Some aspects of process control in semiconductor manufacturing

Keelin Relihan; Shane Geraghty; Aidan O'Dwyer

doi:10.21427/yy0q-6189

Some aspects of process control in semiconductor manufacturing

Keelin Relihan, Shane Geraghty, Aidan O'Dwyer

Technological University Dublin

Research output: Contribution to conference › Paper › peer-review

Abstract

This paper outlines some aspects of process control in semiconductor manufacturing. Starting with an outline of the semiconductor manufacturing process, the contribution will discuss temperature control of the chemical vapour deposition stage and the control of the wafer etching process, based on the industrial experience of the first two authors. Subsequently, the authors draw the attention of the semiconductor manufacturing community to the potential of properly tuned PID controllers for the achievement of simple and high performance control solutions.

Original language	English
DOIs	https://doi.org/10.21427/yy0q-6189
Publication status	Published - 2007
Event	24th International Manufacturing Conference - Waterford, Ireland Duration: 1 Aug 2007 → 31 Aug 2007

Conference

Conference	24th International Manufacturing Conference
Country/Territory	Ireland
City	Waterford
Period	1/08/07 → 31/08/07

Keywords

process control
semiconductor manufacturing
temperature control
chemical vapour deposition
wafer etching
PID controllers

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10.21427/yy0q-6189Licence: CC BY-NC-SA

Cite this

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title = "Some aspects of process control in semiconductor manufacturing",

abstract = "This paper outlines some aspects of process control in semiconductor manufacturing. Starting with an outline of the semiconductor manufacturing process, the contribution will discuss temperature control of the chemical vapour deposition stage and the control of the wafer etching process, based on the industrial experience of the first two authors. Subsequently, the authors draw the attention of the semiconductor manufacturing community to the potential of properly tuned PID controllers for the achievement of simple and high performance control solutions.",

keywords = "process control, semiconductor manufacturing, temperature control, chemical vapour deposition, wafer etching, PID controllers",

author = "Keelin Relihan and Shane Geraghty and Aidan O'Dwyer",

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AU - Geraghty, Shane

AU - O'Dwyer, Aidan

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AB - This paper outlines some aspects of process control in semiconductor manufacturing. Starting with an outline of the semiconductor manufacturing process, the contribution will discuss temperature control of the chemical vapour deposition stage and the control of the wafer etching process, based on the industrial experience of the first two authors. Subsequently, the authors draw the attention of the semiconductor manufacturing community to the potential of properly tuned PID controllers for the achievement of simple and high performance control solutions.

KW - process control

KW - semiconductor manufacturing

KW - temperature control

KW - chemical vapour deposition

KW - wafer etching

KW - PID controllers

U2 - 10.21427/yy0q-6189

DO - 10.21427/yy0q-6189

M3 - Paper

T2 - 24th International Manufacturing Conference

Y2 - 1 August 2007 through 31 August 2007

ER -

Some aspects of process control in semiconductor manufacturing

Abstract

Conference

Keywords

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