Abstract
We investigate a non-destructive approach for the characterization of proton exchanged layers in LiNbO3 with sub-micrometric resolution by means of piezoresponse force microscopy (PFM). Through systematic analyses, we identify a clear correlation between optical measurements on the extraordinary refractive index and PFM measurements on the piezoelectric d33 coefficient. Furthermore, we quantify the reduction of the latter induced by proton exchange as 83 ± 2% and 68 ± 3% of the LiNbO3 value, for undoped and 5 mol. % MgO-doped substrates, respectively.
Original language | English |
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Article number | 066815 |
Journal | Journal of Applied Physics |
Volume | 116 |
Issue number | 6 |
DOIs | |
Publication status | Published - 14 Aug 2014 |
Externally published | Yes |