Least squares algorithm for rapid analysis of Fabry-Perot fringe patterns

Michael O'Hora; Brian Bowe; Vincent Toal

doi:10.1088/1464-4258/7/6/017

Least squares algorithm for rapid analysis of Fabry-Perot fringe patterns

Michael O'Hora
, Brian Bowe
, Vincent Toal

Research output: Contribution to journal › Article › peer-review

Abstract

Accurate measurement and analysis of Fabry-Perot fringe patterns is essential in many areas of optical metrology. This paper presents a least squares, two dimensional method of interferogram acquisition and fringe analysis, which ensures highly accurate results together with rapid measurement. An experimental implementation is also described, using a conventional CCD camera to image fringes, demonstrating a measurement bandwidth of 25 Hz, and an estimated phase measurement accuracy of δε = ± (5 × 10^-4).

Original language	English
Pages (from-to)	S364-S367
Journal	Journal of Optics A: Pure and Applied Optics
Volume	7
Issue number	6
DOIs	https://doi.org/10.1088/1464-4258/7/6/017
Publication status	Published - 1 Jun 2005

Keywords

Fabry-Perot
Fringe analysis
Interferometry
Optical metrology

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10.1088/1464-4258/7/6/017

Cite this

@article{e428046c280e476ea45123a9c994a4d7,

title = "Least squares algorithm for rapid analysis of Fabry-Perot fringe patterns",

abstract = "Accurate measurement and analysis of Fabry-Perot fringe patterns is essential in many areas of optical metrology. This paper presents a least squares, two dimensional method of interferogram acquisition and fringe analysis, which ensures highly accurate results together with rapid measurement. An experimental implementation is also described, using a conventional CCD camera to image fringes, demonstrating a measurement bandwidth of 25 Hz, and an estimated phase measurement accuracy of δε = ± (5 × 10-4).",

keywords = "Fabry-Perot, Fringe analysis, Interferometry, Optical metrology",

author = "Michael O'Hora and Brian Bowe and Vincent Toal",

year = "2005",

month = jun,

day = "1",

doi = "10.1088/1464-4258/7/6/017",

language = "English",

volume = "7",

pages = "S364--S367",

journal = "Journal of Optics A: Pure and Applied Optics",

issn = "1464-4258",

publisher = "IOP Publishing Ltd.",

number = "6",

}

TY - JOUR

T1 - Least squares algorithm for rapid analysis of Fabry-Perot fringe patterns

AU - O'Hora, Michael

AU - Bowe, Brian

AU - Toal, Vincent

PY - 2005/6/1

Y1 - 2005/6/1

N2 - Accurate measurement and analysis of Fabry-Perot fringe patterns is essential in many areas of optical metrology. This paper presents a least squares, two dimensional method of interferogram acquisition and fringe analysis, which ensures highly accurate results together with rapid measurement. An experimental implementation is also described, using a conventional CCD camera to image fringes, demonstrating a measurement bandwidth of 25 Hz, and an estimated phase measurement accuracy of δε = ± (5 × 10-4).

AB - Accurate measurement and analysis of Fabry-Perot fringe patterns is essential in many areas of optical metrology. This paper presents a least squares, two dimensional method of interferogram acquisition and fringe analysis, which ensures highly accurate results together with rapid measurement. An experimental implementation is also described, using a conventional CCD camera to image fringes, demonstrating a measurement bandwidth of 25 Hz, and an estimated phase measurement accuracy of δε = ± (5 × 10-4).

KW - Fabry-Perot

KW - Fringe analysis

KW - Interferometry

KW - Optical metrology

UR - https://www.scopus.com/pages/publications/18744372414

U2 - 10.1088/1464-4258/7/6/017

DO - 10.1088/1464-4258/7/6/017

M3 - Article

AN - SCOPUS:18744372414

SN - 1464-4258

VL - 7

SP - S364-S367

JO - Journal of Optics A: Pure and Applied Optics

JF - Journal of Optics A: Pure and Applied Optics

IS - 6

ER -

Least squares algorithm for rapid analysis of Fabry-Perot fringe patterns

Abstract

Keywords

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