Abstract
A suspended metal gate field effect transistor was studied as a hydrogen sensor and the surface processes at an electrochemlcally deposited Pd layer on the gate were examined. It has been found that the time constant as well as the magnitude of the response depends on the operating conditions, particularly on the presence of oxygen. If the device is tested in air, the dynamic range logarithmically spans 5 decades of partial pressure of hydrogen.
| Original language | English |
|---|---|
| Pages (from-to) | 1757-1761 |
| Number of pages | 5 |
| Journal | Analytical Chemistry |
| Volume | 58 |
| Issue number | 8 |
| DOIs | |
| Publication status | Published - Jul 1986 |
| Externally published | Yes |