Estimating particle temperature for an argon-oxygen discharge by using langmuir probe and optical emission spectroscopy

M. Aflori; G. Amarandei; L. M. Ivan; D. G. Dimitriu; D. Dorohoi

Estimating particle temperature for an argon-oxygen discharge by using langmuir probe and optical emission spectroscopy

M. Aflori, G. Amarandei, L. M. Ivan, D. G. Dimitriu, D. Dorohoi

Research output: Contribution to journal › Article › peer-review

Abstract

The glow region of a argon-oxygen mixture rf asymmetrically capacitively coupled plasma was studied using a self-compensated Langmuir probe. Optical emission spectroscopy has been used to obtain information about different plasma parameters as well as the processes which take place in plasma in the range of the studied pressures and powers. 0323-0465/05.

Original language	English
Pages (from-to)	491-499
Number of pages	9
Journal	Acta Physica Slovaca
Volume	55
Issue number	6
Publication status	Published - 2005
Externally published	Yes

Cite this

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title = "Estimating particle temperature for an argon-oxygen discharge by using langmuir probe and optical emission spectroscopy",

abstract = "The glow region of a argon-oxygen mixture rf asymmetrically capacitively coupled plasma was studied using a self-compensated Langmuir probe. Optical emission spectroscopy has been used to obtain information about different plasma parameters as well as the processes which take place in plasma in the range of the studied pressures and powers. 0323-0465/05.",

author = "M. Aflori and G. Amarandei and Ivan, {L. M.} and Dimitriu, {D. G.} and D. Dorohoi",

year = "2005",

language = "English",

volume = "55",

pages = "491--499",

journal = "Acta Physica Slovaca",

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publisher = "Slovak Academy of Sciences, Institute of Physics",

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T1 - Estimating particle temperature for an argon-oxygen discharge by using langmuir probe and optical emission spectroscopy

AU - Aflori, M.

AU - Amarandei, G.

AU - Ivan, L. M.

AU - Dimitriu, D. G.

AU - Dorohoi, D.

PY - 2005

Y1 - 2005

N2 - The glow region of a argon-oxygen mixture rf asymmetrically capacitively coupled plasma was studied using a self-compensated Langmuir probe. Optical emission spectroscopy has been used to obtain information about different plasma parameters as well as the processes which take place in plasma in the range of the studied pressures and powers. 0323-0465/05.

AB - The glow region of a argon-oxygen mixture rf asymmetrically capacitively coupled plasma was studied using a self-compensated Langmuir probe. Optical emission spectroscopy has been used to obtain information about different plasma parameters as well as the processes which take place in plasma in the range of the studied pressures and powers. 0323-0465/05.

UR - http://www.scopus.com/inward/record.url?scp=69249116205&partnerID=8YFLogxK

M3 - Article

AN - SCOPUS:69249116205

SN - 0323-0465

VL - 55

SP - 491

EP - 499

JO - Acta Physica Slovaca

JF - Acta Physica Slovaca

IS - 6

ER -

Estimating particle temperature for an argon-oxygen discharge by using langmuir probe and optical emission spectroscopy

Abstract

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