Deposition and doping of CdS/CdTe thin film solar cells

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Abstract

1% oxygen is incorporated into both CdS and CdTe layers through RF sputtering of CdS/CdTe thin film solar cells. The optical and electrical parameters of the oxygenated and O2-free devices are compared after CdCl2 treatment and annealing in ambient Ar and/or air. The effects of ambient annealing on the electrical and optical properties of the films are investigated using current-voltage characterization, field emission scanning electron microscopy, X-ray diffraction, and optical transmission spectroscopy. The 1% oxygen content can slightly increase the grain size while the crystallinity does not change. Annealing in ambient Ar can increase the transmission rate of the oxygenated devices.

Original languageEnglish
Article number054001
JournalJournal of Semiconductors
Volume36
Issue number5
DOIs
Publication statusPublished - 1 May 2015
Externally publishedYes

Keywords

  • CdTe thin film
  • oxygen incorporation
  • SEM
  • X-ray diffraction

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