Abstract
This paper reviews some of the major recent advances in single-crystal diamond nanofabrication and its impact in nano-and micromechanical, nanophotonics and optomechanical components. These constituents of integrated devices incorporating specific dopants in the material provide the capacity to enhance the sensitivity in detecting mass and forces as well as magnetic field down to quantum mechanical limits and will lead pioneering innovations in ultrasensitive sensing and precision measurements in the realm of the medical sciences, quantum sciences and related technologies.
Original language | English |
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Article number | 17061 |
Journal | Microsystems and Nanoengineering |
Volume | 3 |
DOIs | |
Publication status | Published - 2017 |
Keywords
- Nano-diamonds
- Nanofabrication
- Nanomechanics
- Nanophotonics
- Optomechanics